An x-ray diffraction study of interface roughness and diffusion in Ag/Pd superlattices

K. Temst, M.J. van Bael, Ch. van Haesendonck, Y. Bruynseraede, D.G. de Groot, N.J. Koeman, R.P. Griessen

Research output: Contribution to JournalArticleAcademicpeer-review

Abstract

The influence of thermal annealing on the surface and interface roughness of epitaxial Ag/Pd superlattices has been quantitatively characterized by high-angle X-ray diffraction and atomic force microscopy. Although Ag and Pd form a continuous series of solid solutions, it is shown that thermal annealing of the layered structure does not lead to complete interdiffusion, but rather to a clustering of the individual components. The bulk phase diagram of materials is clearly not the only factor determining the structural properties of thin layers in superlattices.
Original languageEnglish
Pages (from-to)174-179
JournalThin Solid Films
Volume342
DOIs
Publication statusPublished - 1999

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